Concentration Meter
KURABO’s Concentration Meter features long-term stability, high accuracy, and high response speed.
It is ideal for production sites for semiconductors and liquid crystal panels where control of chemical concentration is critical. It contributes to the reduction of downtime in the production process while ensuring high reliability, long life, and long-term stability.
Product classification
Inline type
ChemicAlyzer Ace-3 (High performance type)
Allows highly accurate measurement. An inline type system allowing simultaneous measurement of up to 4 components.
ChemicAlyzer Pro-2 (Standard type)
KURABO’s bestselling standard concentration meter model. Compact type integrating a data processing unit and measurement unit.
RD-20+
Sealed structure and fluoroplastic coating provide superior resistance to corrosion and the environment.
Offline wagon type
chemicAlyzerII
All-in-one wagon with superior total balance for measuring various kinds of chemical solutions with a single system
Sinple wagon
Reasonably priced wagon for a particular chemical solution. Ideal model for off-line control of chemical concentrations in various processes.
List of chemical solutions by device type
For semiconductor industry
| Main chemical solution | Concentration range (wt%) | |
| NH3-H202 | NH3 | 0 - 5 |
|---|---|---|
| H202 | 0 - 5 | |
| H2SO4-H202 | H2SO4 | 70 - 90 |
| H2O2 | 0 - 5 | |
| HCI-H202 | HCI | 0 - 10 |
| H2O2 | 0 - 5 | |
| HF-H202 | HF | 0 - 5 |
| H2O2 | 0 - 5 | |
| HF-NH4F | HF | 0 - 5 |
| NH4F | 34 - 40 | |
| H3PO4 | H3PO4 | 70 - 89 |
| HF-HNO3 | HF | 0 - 5 |
| HNO3 | 50 - 70 | |
For general industry
| Other solutions applied in the past | |
| HF-HCL | Acid value-OH value |
| HF-HCL | DMAC-PVP |
| HCl-FeCI3 | Trace water in DMAC |
| IPA | NMP |
| IPA-HF | PVP |
| KOH-surfactant | KI-HBO4 |
| Trace water in ethanol | Ethel |
| HF-HNO3-CH3COOH | H3PO4-HNO3-CH3COOH |
| N2H4-KOH-NH3 | Ethanol-acetic acid |
| Resist separation liquid | CH3COOH-Co |
| Metallic etching liquid | Minute amount of metallic ion |
Measurement principle
Concentration Meter
Each material has a different wavelength for absorbing light and the amount of absorbance varies according to its concentration. This instrument measures these changes for concentration measurement.
Light of eight specific wavelengths irradiates the load cell which is filled with chemical, and the concentration is measured from the intensity of each wavelength.
It is necessary to create a calibration curve, which is a formula expressing the relationship between concentration and absorbance (amount of light absorbance).
However, it is unnecessary for customers to create a calibration curve themselves because the instrument is delivered after the calibration curve is created by KURABO.
The customer can use the system as just a concentration meter.